In situmeasurement of MEMS topography based on phase-shifting interferometry
نویسندگان
چکیده
منابع مشابه
Phase-shifting interferometry based on induced vibrations.
The presence of uncontrolled mechanical vibrations is typically the main precision-limiting factor of a phase-shifting interferometer. We present a method that instead of trying to insolate vibrations; it takes advantage of their presence to produce the different phase-steps. The method is based on spatial and time domain processing techniques to compute first the different unknown phase-steps ...
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We demonstrate a MEMS-based, phase-shifting interferometer (MBPSI) that is much faster than conventional phase-shifting interferometers (PSI). For phase shifting, our system employs a comb-driven vertically resonating micromachined mirror illuminated by synchronized laser pulses ( =660nm). Our MBPSI employs a four-frame phase-shifting technique (four CMOS-imager frames per one profile measureme...
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We present a theoretical analysis to estimate the amount of phase noise due to noisy interferograms in Phase Shifting Interferometry (PSI). We also analyze the fact that linear filtering transforms corrupting multiplicative noise in Electronic Speckle Pattern Interferometry (ESPI) into fringes corrupted by additive gaussian noise. This fact allow us to obtain a formula to estimate the standard ...
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This paper describes some practical methods to calibrate the phase shifter in phase-shifting interferometry (PSI). The phase shifter used in the experiment is a piezoelectric transducer (PZT) that has a nonlinearity of <l%. Using the quantitative method described in this paper, the repeatability in the measurement of the phase-shifting angle is ̃9.046 rms, and the 3σ value is 0.139. A calibratio...
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An asynchronous phase-shifting method based on principal component analysis (PCA) is presented. No restrictions about the background, modulation, and phase shifts are necessary. The presented method is very fast and needs very low computational requirements, so it can be used with very large images and/or very large image sets. The method is based on obtaining two quadrature signals by the PCA ...
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ژورنال
عنوان ژورنال: Optical Engineering
سال: 2015
ISSN: 0091-3286
DOI: 10.1117/1.oe.54.2.024103